Mechanical strengthening of Si cantilevers by chemical wet...

Microsystem Technologies 2013 / 04 Vol. 19; Iss. 4

Mechanical strengthening of Si cantilevers by chemical wet etching

Mitsuhiro Shikida, Tatsuya Hasegawa, Kayo Hamaguchi, Kazuo Sato
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
19
Language:
english
DOI:
10.1007/s00542-012-1651-5
Date:
April, 2013
File:
PDF, 721 KB
english, 2013
Conversion to is in progress
Conversion to is failed