![](/img/cover-not-exists.png)
[IEEE Nanoscale Phenomena in Polar Materials - Vancouver, BC, Canada (2011.07.24-2011.07.27)] 2011 International Symposium on Applications of Ferroelectrics (ISAF/PFM) and 2011 International Symposium on Piezoresponse Force Microscopy and Nanoscale Phenomena in Polar Materials - In-situ large scale deposition of PZT films by RF magnetron sputtering
Kratzer, Martin, Castaldi, Lorenzo, Heinz, Bernd, Mamazza, Robert, Kaden, Dirk, Quenzer, Hans-Joachim, Wagner, BernhardYear:
2011
Language:
english
DOI:
10.1109/ISAF.2011.6013981
File:
PDF, 270 KB
english, 2011