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Polycrystalline silicon thin films processed with silicon ion implantation and subsequent solid-phase crystallization: Theory, experiments, and thin-film transistor applications
Yamauchi, Noriyoshi, Reif, RafaelVolume:
75
Year:
1994
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.356131
File:
PDF, 3.37 MB
english, 1994