Force-controllable, optically driven micromachines...

Journal of Microelectromechanical Systems 2003 / 10 Vol. 12; Iss. 5

Force-controllable, optically driven micromachines fabricated by single-step two-photon microstereolithography

Maruo, S., Ikuta, K., Korogi, H.
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Volume:
12
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/JMEMS.2003.817894
Date:
October, 2003
File:
PDF, 768 KB
english, 2003
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