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Pull-in study of an electrostatic torsion microactuator
Degani, O., Socher, E., Lipson, A., Lejtner, T., Setter, D.J., Kaldor, S., Nemirovsky, Y.Volume:
7
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/84.735344
Date:
January, 1998
File:
PDF, 336 KB
english, 1998