Pull-in study of an electrostatic torsion microactuator

Degani, O., Socher, E., Lipson, A., Lejtner, T., Setter, D.J., Kaldor, S., Nemirovsky, Y.

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Volume:

Language:

english

Journal:

Journal of Microelectromechanical Systems

DOI:

10.1109/84.735344

Date:

January, 1998

File:

PDF, 336 KB

english, 1998

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