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Squeeze film damping effect on the dynamic response of a MEMS torsion mirror
Pan, Feixia, Kubby, Joel, Peeters, Eric, Tran, Alex T, Mukherjee, SubrataVolume:
8
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/8/3/005
Date:
September, 1998
File:
PDF, 244 KB
english, 1998