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Electrical transport and Al doping efficiency in nanoscale ZnO films prepared by atomic layer deposition
Wu, Y., Hermkens, P. M., van de Loo, B. W. H., Knoops, H. C. M., Potts, S. E., Verheijen, M. A., Roozeboom, F., Kessels, W. M. M.Volume:
114
Year:
2013
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.4813136
File:
PDF, 1.92 MB
english, 2013