Passivation of black silicon boron emitters with atomic...

physica status solidi (RRL) - Rapid Research Letters 2013 / 11 Vol. 7; Iss. 11

Passivation of black silicon boron emitters with atomic layer deposited aluminum oxide

Repo, Päivikki, Benick, Jan, Gastrow, Guillaume von, Vähänissi, Ville, Heinz, Friedemann D., Schön, Jonas, Schubert, Martin C., Savin, Hele
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Volume:
7
Language:
english
Journal:
physica status solidi (RRL) - Rapid Research Letters
DOI:
10.1002/pssr.201308096
Date:
November, 2013
File:
PDF, 461 KB
english, 2013
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