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Strain sensitivity of nickel-containing amorphous hydrogenated carbon (Ni:a-C:H) thin films prepared by r.f. sputtering using substrate bias conditions
Schultes, Guenter, Frey, Peter, Goettel, Dirk, Freitag-Weber, OliviaVolume:
15
Language:
english
Journal:
Diamond and Related Materials
DOI:
10.1016/j.diamond.2005.07.005
Date:
January, 2006
File:
PDF, 209 KB
english, 2006