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Characterization of high- Q spiral inductors on thick insulator-on-silicon
Rais-Zadeh, Mina, Ayazi, FarrokhVolume:
15
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/15/11/016
Date:
November, 2005
File:
PDF, 1.91 MB
english, 2005