PLD of large area films onto substrate undergoing...

PLD of large area films onto substrate undergoing translational motion by mask method

Kuzanyan, A.S.
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Volume:
13
Language:
english
Journal:
IEEE Transactions on Appiled Superconductivity
DOI:
10.1109/TASC.2003.812027
Date:
June, 2003
File:
PDF, 393 KB
english, 2003
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