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Piezoelectric Unimorph Microactuator Arrays for Single-Crystal Silicon Continuous-Membrane Deformable Mirror
Hishinuma, Y., Yang, E.-H.Volume:
15
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/JMEMS.2006.872229
Date:
April, 2006
File:
PDF, 1.73 MB
english, 2006