Modeling of radiative properties of Sn plasmas for extreme-ultraviolet source
Sasaki, Akira, Sunahara, Atsushi, Furukawa, Hiroyuki, Nishihara, Katsunobu, Fujioka, Shinsuke, Nishikawa, Takeshi, Koike, Fumihiro, Ohasni, Hayato, Tanuma, HajimeVolume:
107
Year:
2010
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.3373427
File:
PDF, 1.15 MB
english, 2010