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Anisotropic etching of silicon at high pressure
A.P. Abbott, S.A. Campbell, J. Satherley, D.J. SchiffrinVolume:
348
Year:
1993
Language:
english
Pages:
7
DOI:
10.1016/0022-0728(93)80154-a
File:
PDF, 469 KB
english, 1993