Si-rich Al2O3films grown by RF magnetron sputtering: structural and photoluminescence properties versus annealing treatment
Nadiia Korsunska, Larysa Khomenkova, Oleksandr Kolomys…Volume:
8
Language:
english
DOI:
10.1186/1556-276X-8-273
Date:
December, 2013
File:
PDF, 682 KB
english, 2013