Atom-to-atom interactions for atomic layer deposition of...

Nanoscale Research Letters 2013 / 12 Vol. 8; Iss. 1

Atom-to-atom interactions for atomic layer deposition of trimethylaluminum on Ga-rich GaAs(001)-4 × 6 and As-rich GaAs(001)-2 × 4 surfaces: a synchrotron radiation photoemission study

Tun-Wen Pi, Hsiao-Yu Lin, Ya-Ting Liu, Tsung-Da Lin…
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Volume:
8
Language:
english
DOI:
10.1186/1556-276X-8-169
Date:
December, 2013
File:
PDF, 1.13 MB
english, 2013
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