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Electrical characterization of integrated passive devices using thin film technology for 3D integration
Xin Sun, Yun-hui Zhu, Zhen-hua Liu, Qing-hu Cui…Volume:
14
Language:
english
DOI:
10.1631/jzus.C12MNT01
Date:
April, 2013
File:
PDF, 1.48 MB
english, 2013