Effects of squeeze film damping on a clamped-clamped beam...

Journal of Micro-Bio Robotics 2013 / 04 Vol. 8; Iss. 2

Effects of squeeze film damping on a clamped-clamped beam MEMS filter

Aliasghar Keyvani, Morteza H. Sadeghi, Ghader Rezazadeh…
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Volume:
8
Language:
english
DOI:
10.1007/s12213-013-0067-3
Date:
April, 2013
File:
PDF, 413 KB
english, 2013
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