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Wafer scale direct-write of Ge and Si nanostructures with conducting stamps and a modified mask aligner
Hideki Sato, Stephanie E. Vasko, Marco RolandiVolume:
6
Language:
english
DOI:
10.1007/s12274-013-0302-1
Date:
April, 2013
File:
PDF, 698 KB
english, 2013