Excimer laser doping using highly doped silicon...

physica status solidi (a) 2013 / 11 Vol. 210; Iss. 11

Excimer laser doping using highly doped silicon nanoparticles

Meseth, Martin, Kunert, Bernd Christian, Bitzer, Lucas, Kunze, Frederik, Meyer, Sebastian, Kiefer, Fabian, Dehnen, Martin, Orthner, Hans, Petermann, Nils, Kummer, Malin, Wiggers, Hartmut, Harder, Nils
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Volume:
210
Language:
english
Journal:
physica status solidi (a)
DOI:
10.1002/pssa.201329012
Date:
November, 2013
File:
PDF, 575 KB
english, 2013
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