Analysis of Electret-Based MEMS Vibrational Energy Harvester With Slit-and-Slider Structure
Sato, Norio, Ono, Kazuyoshi, Shimamura, Toshishige, Kuwabara, Kei, Ugajin, Mamoru, Sato, YasuhiroVolume:
21
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/JMEMS.2012.2204862
Date:
October, 2012
File:
PDF, 1.04 MB
english, 2012