Electromechanical Sensing of Charge Retention on Floating...

Journal of Microelectromechanical Systems 2011 / 02 Vol. 20; Iss. 1

Electromechanical Sensing of Charge Retention on Floating Electrodes

Elata, David, Leus, Vitaly, Provine, J., Hirshberg, Arnon, Howe, Roger T.
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Volume:
20
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/JMEMS.2010.2090499
Date:
February, 2011
File:
PDF, 687 KB
english, 2011
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