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[IEEE 2009 International Conference on Industrial Mechatronics and Automation (ICIMA 2009) - Chengdu, China (2009.05.15-2009.05.16)] 2009 International Conference on Industrial Mechatronics and Automation - Design optimization of cantilever Beam MEMS switch
Yanjue Gong,, Li Zhang,, Fu Zhao,, Chunling Meng,, Liang Lv,Year:
2009
Language:
english
DOI:
10.1109/ICIMA.2009.5156552
File:
PDF, 585 KB
english, 2009