Influence of Ti film thickness and oxidation temperature on...

Influence of Ti film thickness and oxidation temperature on TiO2 thin film formation via thermal oxidation of sputtered Ti film

Sartale, S.D., Ansari, A.A., Rezvani, S.-J.
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Volume:
16
Language:
english
Journal:
Materials Science in Semiconductor Processing
DOI:
10.1016/j.mssp.2013.07.006
Date:
December, 2013
File:
PDF, 2.91 MB
english, 2013
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