Influence of Ti film thickness and oxidation temperature on TiO2 thin film formation via thermal oxidation of sputtered Ti film
Sartale, S.D., Ansari, A.A., Rezvani, S.-J.Volume:
16
Language:
english
Journal:
Materials Science in Semiconductor Processing
DOI:
10.1016/j.mssp.2013.07.006
Date:
December, 2013
File:
PDF, 2.91 MB
english, 2013