On sheath energization and Ohmic heating in sputtering...

Plasma Sources Science and Technology 2013 / 08 Vol. 22; Iss. 4

On sheath energization and Ohmic heating in sputtering magnetrons

Huo, Chunqing, Lundin, Daniel, Raadu, Michael A, Anders, André, Gudmundsson, Jon Tomas, Brenning, Nils
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Volume:
22
Language:
english
Journal:
Plasma Sources Science and Technology
DOI:
10.1088/0963-0252/22/4/045005
Date:
August, 2013
File:
PDF, 1.97 MB
english, 2013
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