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Two complementary ways of thin-metal-film patterning using laser beam interference and direct ablation
Indrišiūnas, Simonas, Voisiat, Bogdan, Gedvilas, Mindaugas, Račiukaitis, GediminasVolume:
23
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/23/9/095034
Date:
September, 2013
File:
PDF, 3.34 MB
english, 2013