Properties of rf-sputtered indium–tin-oxynitride thin...

Properties of rf-sputtered indium–tin-oxynitride thin films

Aperathitis, Elias, Bender, Marcus, Cimalla, Volker, Ecke, Gernot, Modreanu, Mircea
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Volume:
94
Year:
2003
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.1582368
File:
PDF, 537 KB
english, 2003
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