Properties of rf-sputtered indiumâtin-oxynitride thin films
Aperathitis, Elias, Bender, Marcus, Cimalla, Volker, Ecke, Gernot, Modreanu, MirceaVolume:
94
Year:
2003
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.1582368
File:
PDF, 537 KB
english, 2003