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Evolutionary continuous cellular automaton for the simulation of wet etching of quartz
Ferrando, N, Gosálvez, M A, Colóm, R JVolume:
22
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/22/2/025021
Date:
February, 2012
File:
PDF, 6.36 MB
english, 2012