Comparison of Nanosized Pattern of Calixarene and ZEP520 Resists by Using Energy Deposition Distribution
Zhang, Hui, Komori, Takuya, Mohamad, Zulfakri, Yin, You, Hosaka, SumioVolume:
534
Language:
english
Journal:
Key Engineering Materials
DOI:
10.4028/www.scientific.net/KEM.534.107
Date:
January, 2013
File:
PDF, 296 KB
english, 2013