Stabilized two-dimensional linewidth enhancement in direct laser lithography
Rhee, Hyug-Gyo, Ghim, Young-Sik, Lee, Yun-WooVolume:
37
Language:
english
Journal:
Precision Engineering
DOI:
10.1016/j.precisioneng.2013.03.007
Date:
October, 2013
File:
PDF, 1.42 MB
english, 2013