Uniformity and Morphology of 10 x 100mm 4° Off-Axis 4H-SiC...

Materials Science Forum 2013 / 1 Vol. 740-742

Uniformity and Morphology of 10 x 100mm 4° Off-Axis 4H-SiC Epitaxial Layers and their Effect on Device Performance

Das, Hrishikesh, Sunkari, Swapna, Oldham, Timothy, Rodgers, Josh, Casady, Janna
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Volume:
740-742
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.740-742.221
Date:
January, 2013
File:
PDF, 1.40 MB
english, 2013
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