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Cathodoluminescent contrast of direct writing patterns in the scanning electron microscope
G.V. Saparin, S.K. Obyden, M.V. Chukichev, S.I. PopovVolume:
31-32
Year:
1984
Language:
english
Pages:
3
DOI:
10.1016/0022-2313(84)90095-4
File:
PDF, 144 KB
english, 1984