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Fast Growth of Polycrystalline Film in SiCl 4 /H 2 Plasma
Rui, Huang, Xuan-Ying, Lin, Yun-Peng, Yu, Kui-Xun, Lin, Jun-Hong, Wei, Chu-Ying, Yu, Zhao-Kui, WangVolume:
21
Language:
english
Journal:
Chinese Physics Letters
DOI:
10.1088/0256-307X/21/6/053
Date:
June, 2004
File:
PDF, 261 KB
english, 2004