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Maskless direct micro-structuring of PDMS by femtosecond laser localized rapid curing
Selvaraj, Hamsapriya, Tan, Bo, Venkatakrishnan, KVolume:
21
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/21/7/075018
Date:
July, 2011
File:
PDF, 616 KB
english, 2011