Optimal design and fabrication of MEMS rotary thermal actuators
Heo, Seok, Kim, Yoon YoungVolume:
17
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/17/11/010
Date:
November, 2007
File:
PDF, 1.16 MB
english, 2007