Stable zipping RF MEMS varactors

Journal of Micromechanics and Microengineering 2010 / 03 Vol. 20; Iss. 3

Stable zipping RF MEMS varactors

Pu, Suan Hui, Holmes, Andrew S, Yeatman, Eric M, Papavassiliou, Christos, Lucyszyn, Stepan
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Volume:
20
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/20/3/035030
Date:
March, 2010
File:
PDF, 782 KB
english, 2010
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