Characterisation of porous silicon layers by spectroscopic ellipsometry
U. Rossow, H. Münder, M. Thönissen, W. TheiβVolume:
57
Year:
1993
Language:
english
Pages:
5
DOI:
10.1016/0022-2313(93)90134-9
File:
PDF, 404 KB
english, 1993