Investigation of different oxidation processes for porous Si by XPS
H. Münder, M.G. Berger, S. Frohnhoff, M. Thönissen, H. Lüth, M. Jeske, J.W. SchultzeVolume:
57
Year:
1993
Language:
english
Pages:
4
DOI:
10.1016/0022-2313(93)90137-c
File:
PDF, 335 KB
english, 1993