A comprehensive model to predict the charging and...

Journal of Micromechanics and Microengineering 2004 / 04 Vol. 14; Iss. 4

A comprehensive model to predict the charging and reliability of capacitive RF MEMS switches

Spengen, W Merlijn van, Puers, Robert, Mertens, Robert, Wolf, Ingrid De
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Volume:
14
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/14/4/011
Date:
April, 2004
File:
PDF, 1.03 MB
english, 2004
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