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[IEEE 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems (MEMS) - Cancun, Mexico (2011.01.23-2011.01.27)] 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems - A high-performance, temperature-stable, continuously tuned MEMS capacitor
Shim, Yonghyun, Wu, Zhengzheng, Rais-Zadeh, MinaYear:
2011
Language:
english
DOI:
10.1109/MEMSYS.2011.5734534
File:
PDF, 2.15 MB
english, 2011