MEMS Fabry–Pérot optical accelerometer employing mechanical...

Sensors and Actuators A: Physical 2014 / 08 Vol. 215

MEMS Fabry–Pérot optical accelerometer employing mechanical amplification via a V-beam structure

Davies, Edward, George, David S., Gower, Malcolm C., Holmes, Andrew S.
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Volume:
215
Language:
english
Journal:
Sensors and Actuators A: Physical
DOI:
10.1016/j.sna.2013.08.002
Date:
August, 2014
File:
PDF, 4.10 MB
english, 2014
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