Design of a Temperature-Stable RF MEM Capacitor

Journal of Microelectromechanical Systems 2004 / 10 Vol. 13; Iss. 5

Design of a Temperature-Stable RF MEM Capacitor

Nieminen, H., Ermolov, V., Silanto, S., Nybergh, K., Ryhanen, T.
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Volume:
13
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/JMEMS.2004.832192
Date:
October, 2004
File:
PDF, 1.87 MB
english, 2004
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