SPIE Proceedings [SPIE SPIE Defense, Security, and Sensing - Baltimore, Maryland, USA (Monday 29 April 2013)] Infrared Imaging Systems: Design, Analysis, Modeling, and Testing XXIV - Uncertainty evaluation of the geometrical thickness and refractive index of silicon wafers
Jin, Jonghan, Holst, Gerald C., Krapels, Keith A., Park, Jungjae, Kim, Jae Wan, Kim, Jong-Ahn, Kang, Chu-ShikVolume:
8706
Year:
2013
Language:
english
DOI:
10.1117/12.2014800
File:
PDF, 238 KB
english, 2013