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SPIE Proceedings [SPIE SPIE Optical Engineering + Applications - San Diego, California, United States (Sunday 25 August 2013)] Optical Manufacturing and Testing X - Calculation of the reference surface error by analyzing a multiple set of sub-measurements

Maurer, Roland, Schneider, Florian, Wünsche, Christine, Rascher, Rolf, Fähnle, Oliver W., Williamson, Ray, Kim, Dae Wook
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Volume:
8838
Year:
2013
Language:
english
DOI:
10.1117/12.2024003
File:
PDF, 2.28 MB
english, 2013
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