Effect of boron and silicon doping on the surface and...

Surface and Coatings Technology 2013 / 9 Vol. 231

Effect of boron and silicon doping on the surface and electrical properties of diamond like carbon films by magnetron sputtering technique

Park, Chang-Sun, Choi, Sun Gyu, Jang, Jin-Nyoung, Hong, MunPyo, Kwon, Kwang-Ho, Park, Hyung-Ho
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Volume:
231
Language:
english
Journal:
Surface and Coatings Technology
DOI:
10.1016/j.surfcoat.2012.01.014
Date:
September, 2013
File:
PDF, 486 KB
english, 2013
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