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Sacrificial etching of III - V compounds for micromechanical devices
Hjort, KlasVolume:
6
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/6/4/003
Date:
December, 1996
File:
PDF, 312 KB
english, 1996