Formation of TiO x...

Journal of Physics D Applied Physics 2008 / 03 Vol. 41; Iss. 5

Formation of TiO x films produced by high-power pulsed magnetron sputtering

Straňák, Vítězslav, Quaas, Marion, Wulff, Harm, Hubička, Zdeněk, Wrehde, Stefan, Tichý, Milan, Hippler, Rainer
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Volume:
41
Language:
english
Journal:
Journal of Physics D: Applied Physics
DOI:
10.1088/0022-3727/41/5/055202
Date:
March, 2008
File:
PDF, 1.00 MB
english, 2008
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