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Excimer laser and rapid thermal annealing stimulation of solid-phase nucleation and crystallization in amorphous silicon films on glass substrates
Efremov, M D, Bolotov, V V, Volodin, V A, Fedina, L I, Lipatnikov, E AVolume:
8
Language:
english
Journal:
Journal of Physics: Condensed Matter
DOI:
10.1088/0953-8984/8/3/007
Date:
January, 1996
File:
PDF, 493 KB
english, 1996