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X-ray scattering study of hydrogen implantation in silicon
Sousbie, Nicolas, Capello, Luciana, Eymery, JoeÌl, Rieutord, François, Lagahe, ChrystelleVolume:
99
Year:
2006
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.2198928
File:
PDF, 1007 KB
english, 2006