Hydrophobic coatings for MEMS applications

Doms, M, Feindt, H, Kuipers, W J, Shewtanasoontorn, D, Matar, A S, Brinkhues, S, Welton, R H, Mueller, J

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Volume:

Language:

english

Journal:

Journal of Micromechanics and Microengineering

DOI:

10.1088/0960-1317/18/5/055030

Date:

May, 2008

File:

PDF, 2.53 MB

english, 2008

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